Simulation and Design of a 3-DOF Piezoresistive Accelerometer with Uniform Resolution
Keywords:
MEMS, accelerometer, piezoresistance, simulation, uniform resolution.Abstract
In this paper, a three-axis piezoresistive
accelerometer which has uniform resolutions at all axes was
developed using MicroElectroMechanical Systems (MEMS)
technology. This sensor is made of a heavy proof mass and four
long beams which allow us to obtain high resolutions. By
reducing the resonant frequencies, uniform resolutions with
small cross axis sensitivity could be designed. This kind of
sensor was simulated successfully utilizing a finite element
method supported by ANSYS software. The overall chip
dimension of the sensor is 1.5×1.5×0.5 mm3 and the uniform
resolution can be at reached at 0.5 mg.
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